ISSN : 1738-4125(Print)
ISSN : 2287-7509(Online)
ISSN : 2287-7509(Online)
반도체 클린룸용 에어와셔의 암모니아 제거성능 개선 연구
A Study on Ammonia Removal Performance Improvement of an Air Washer for Semiconductor Manufacturing Clean Rooms
Abstract
In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseouscontaminants such as NH3, SOx and organic gases from outdoor air introduced into clean room. In order toimprove the gas removal performance of the air washers, a hot water contact heat exchanger can beinstalled upstream of an air washer, heating and humidifying the incoming outdoor air before entering the airwasher. In the present study, an experiment was carried out to examine closely the improvement of gasremoval efficiency by the insertion of the hot water contact heat exchanger. The experiment showed that thegas removal efficiency was increased by the water vapor condensation effect.
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